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2021-01-15

Aerospace Intelligence assists wafer production in the semiconductor industry


In recent years, the frictions between China and the United States have repeatedly appeared in the newspapers, especially in the fields of import and export trade and 5G. In the 5G field, Huawei’s technological breakthroughs have made it a target of public criticism. The United States intends to suppress China's leading position in the 5G field through political means, and is unwilling to give up its dominance in the 4G era. Similar events have appeared many times in history, but the result is the vigorous development of its own technology. China did not collapse, but broke through the blockade one by one. In addition to mobile phone chips, China's progress in industrial-grade chips is also obvious to all, which also benefits from China's continuous planning and investment in the chip industry.


In the entire chip manufacturing, wafer is an important raw material for chips. Aerospace Intelligent Manufacturing (Shanghai) Technology Co., Ltd. (hereinafter referred to as Aerospace Intelligent Manufacturing) has expanded from the logistics loading and unloading direction in the monocrystalline silicon production process. The crystalline silicon cuts off the material agv, and the monocrystalline silicon takes the crystal car.



At the same time, Aerospace Intelligence is making great efforts to introduceSamsung's supply chain wafer production key technology from South Korea,combining with Shanghai Jiaotong University and Nanjing University of Aeronautics and Astronautics for the application,Accelerating our company’s development of third-generation semiconductor materials and devices and related industries is of great significance.Using our own engineering experience in logistics, assembly, testing, control, cleaning and other fields, we have conducted extensive analysis and research. Several types of process equipment involving multiple production steps have been developed, focusing on key wafer production technologies, and grasping the development opportunities of the third-generation semiconductor industry.

Samsung's supply chain integrates a complete wafer life cycle process, including a series of processes such as wafer production, chip design, chip production, chip carrier equipment (mobile phones, cameras, etc.), providing a good example in the field of wafer intelligent manufacturing effect.


Single crystal silicon crystal pulling production process


Single crystal raw material cleaning




Type: high-pressure flushing type, ultrasonic type;

Applicable raw materials: edge leather, round rods, pointed ends, etc.;

Cleaning capacity: 2T/h;

Cleaning quality: no water stains, no white spots.


Single crystal raw material crushing and screening




Type: crushing and sorting line, screening machine;

Applicable raw materials: edge leather, round rods, pointed ends, etc.;

Purpose: Control the particle size.



Automatic ingredient distribution system




Type: automatic batching system;

Applicable raw materials: crushed materials, powder materials, etc.;

Purpose: Precisely control the distribution ratio of each group, and automatically send it to the corresponding station through the AGV.


Truncated cutting AGV




Type: AGV;

Applicable raw materials: short materials after cutting.

Functions: search for sticks, pick up, coding, navigation, dispatching, MES communication, etc., 8 sticks per car;


Long stick grabbing solution




Type: semi-automatic type, AGV type;

Applicable raw materials: long rods;

Purpose: lifting, rotating, holding, navigation, scheduling, coding function, weighing, etc.


Electrical performance testing line




Type: detection line;

Applicable raw materials: short rods, etc.;

Main functions: code reading, length measurement, weighing, laser coding, low birth life detection, resistivity detection, bad identification and sorting, qualified product classification, MES communication, etc.


Square feeding and unloading system




Type: Conveying system;

Applicable raw materials: round rods, square rods, etc.;

composition: Truss type three-coordinate manipulator + buffer line + dispatching system;

Uses: product classification and distribution of fixed machines, MES communication, etc.


Grinding and unloading system




Type: Conveying system;

Applicable raw materials: round rods, square rods, etc.;

Composition: AGV + truss type three-coordinate manipulator + cache line + dispatching system;

Uses: product classification and distribution of fixed machines, MES communication, etc.


Square rod finished product inspection line




Type: Appearance size inspection line;

Applicable raw materials: finished single crystal rods, etc.;

Purpose: Dimensional detection accuracy is 0.01mm, MES communication;

节拍:优于10S。



At the same time, Aerospace Intelligent Manufacturing has also improved and updated system automation control in the field of monocrystalline silicon production. It has added monitoring sensors on the production line and used a special gateway for high-frequency data acquisition to collect a large amount of on-site process data and environmental data to the control platform. Field engineers According to the characteristics of the process, a variety of algorithm models to improve on-site efficiency, quality, and equipment prediction have been innovatively developed. The models have been trained and verified on-site to effectively improve quality, reduce defects and losses caused by downtime. Aerospace Intelligent Manufacturing will continue to assist wafer production in the semiconductor industry and contribute to the vigorous development of the semiconductor industry.


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